4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

The United States of America as represented by The National Secu

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Device for dispersion compensation using tapered single-mode...

Optical waveguides – With optical coupler – Particular coupling function
Reexamination Certificate

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Method of oxidizing strain-compensated superlattice of group...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of thinning semiconductor wafer of smaller diameter than

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Optical clock recovery device using non-linear optical...

Optical waveguides – Having nonlinear property
Reexamination Certificate

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Tension-tuned acousto-optic bandpass filter

Optical waveguides – Directional optical modulation within an optical waveguide – Acousto-optic
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