4. Optics: measuring and testing
  5. By polarized light examination
  6. With light attenuation

Tetsuzo Tanimoto

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Illuminating method and illuminating apparatus for carrying out

Illumination – Light source and modifier – Laser type
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Projection exposure apparatus and projection exposure method

Optics: measuring and testing – By polarized light examination – With birefringent element
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Projection exposure apparatus and projection exposure method

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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Profile ID: LFUS-PAI-P-1404138

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