Illuminating method and illuminating apparatus for carrying out

Details Illuminating method and illuminating apparatus for carrying out Illuminating method and illuminating apparatus for carrying out

1989-11-20

1991-05-14

Husar, Stephen F.

Illumination

Light source and modifier

Laser type

362268, 362299, 362328, 362331, 350167, F21K 700

Patent

active

050161490

ABSTRACT:
An illuminating method and an illuminating apparatus for use in combination, for example, with an exposure apparatus. The illuminating apparatus comprises amplitude distribution control means for converting the intensity distribution of a light beam emitted by a highly directional light source into a substantially linear intensity distribution, beam splitting means for splitting the light beam into a plurality of component beams, and superposing means for superposing the component beams in a desired area on an object, such as a reticle, in an uniform illuminance distribution.

REFERENCES:
patent: 4109304 (1978-08-01), Khvalovsky et al.
patent: 4370026 (1983-01-01), Dubroeudq et al.
patent: 4851978 (1989-07-01), Ichihara

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