4. Semiconductor device manufacturing: process
  5. Chemical etching

Teresa Yim

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Method for stripping silicon nitride

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Methods of forming shallow trench isolation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2425220

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