Electron beam scribing method

Details Electron beam scribing method Electron beam scribing method

1980-05-01

1982-12-14

Rubinson, G. Z.

Electric heating

Metal heating

By arc

219121ER, 219121EV, 219121EW, 2504922, B23K 1500

Patent

active

043639534

ABSTRACT:
A plurality of band-shaped regions on a specimen are successively scanned by an electron beam having a ribbon-shaped rectangular cross-section. This scanning is effected by deflecting the electron beam electrostatically in the direction of the shorter side of the beam cross-section and electromagnetically in the direction of the longer side of the beam cross-section.

REFERENCES:
patent: 3436510 (1969-04-01), Fyler
patent: 3659510 (1972-05-01), Garvin et al.
patent: 3857041 (1974-12-01), Spicer
patent: 3894271 (1975-07-01), Pfeiffer et al.
patent: 3900737 (1975-08-01), Collier et al.
patent: 4051381 (1977-09-01), Trotel
patent: 4145597 (1979-03-01), Yasuda
patent: 4151422 (1979-04-01), Goto et al.
patent: 4243866 (1981-01-01), Pfeiffer et al.

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