4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Tatsuzo Kawaguchi

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Dielectric film capacitor and method of manufacturing the same

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate

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Sputtering target

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering target

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering target and method of manufacturing the same

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Sputtering target supporting device

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-112946

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