4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...

Tatsuya Terazawa

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Method for forming amorphous carbon film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Methods of generating plasma, of etching an organic material...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Microwave drying method of honeycomb formed bodies

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy – Microwave energy
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Profile ID: LFUS-PAI-P-2169895

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