4. Cleaning and liquid contact with solids
  5. Processes
  6. Including use of vacuum, suction, or inert atmosphere

Takeharu Kawabe

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Method and device for cleaning raw material gas introduction...

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate

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Rotary type CVD film forming apparatus for mass production

Coating apparatus – Gas or vapor deposition – With treating means
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