Rotary type CVD film forming apparatus for mass production

Details Rotary type CVD film forming apparatus for mass production Rotary type CVD film forming apparatus for mass production

2003-06-19

2009-10-20

Kornakov, Michael (Department: 1792)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230AN, C118S728000, C427S577000, C427S238000

Reexamination Certificate

active

07603962

ABSTRACT:
A rotary type CVD film forming apparatus for mass production, wherein a film forming chamber is formed by providing one columnar body having a plurality of housing spaces for housing one plastic container each in one said housing space, a plurality of said film forming chambers is arranged on a rotation support body at equal intervals in a circular state, source gas introduction means serving as an external electrode which introduce a source gas that is converted to plasma inside the plastic containers housed in each of said film forming chambers is provided, and high frequency supply means which supply a high frequency to the external electrode of each of said film forming chambers is provided to form a CVD (chemical vapor growing) film on the internal surfaces of said plastic containers.

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