Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate
2007-03-13
2007-03-13
Chen, Bret (Department: 1762)
Cleaning and liquid contact with solids
Processes
Including use of vacuum, suction, or inert atmosphere
C134S022120, C134S022180, C134S034000, C134S037000, C134S198000, C118S7230AN, C118S7230ER, C118S733000, C427S569000, C427S577000
Reexamination Certificate
active
10511607
ABSTRACT:
A method and apparatus for cleaning a source gas introduction pipe, which can prevent strong adhesion of contaminant mainly containing carbon powder on an outer surface of the source gas introduction pipe to easily remove the contaminant in a short period of time. While compressed air is sprayed toward the contaminant, the contaminant removed by the spray of the compressed air is exhausted outside a system of a deposition chamber by suction and exhausting device so that the contaminant is not transferred to sides of the deposition chamber and a plastic container in which a CVD film is formed, in a process for extracting the source gas introduction pipe from the plastic container after the CVD film is formed on an inner surface of the plastic container.
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Hama Kenichi
Kage Tsuyoshi
Kawabe Takeharu
Kobayashi Takumi
Chen Bret
Kirin Brewery Company Limited
Mitsubishi Shoji Plastics Corporation
Oblon, Spivak. McClelland, Maier & Neustadt, P.C
Youtec Co., Ltd.
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