4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Takatosi Nakanisi

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Method for vapor-phase growth of a superconducting oxide thin fi

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k
Patent

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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Profile ID: LFUS-PAI-P-542229

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