4. Electricity: motive power systems
  5. Positional servo systems
  6. 'reset' systems

Takashi Kitazawa

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Exhaust ring for manufacturing semiconductors

Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit
Design Patent

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Motor control device

Electricity: motive power systems – Control by patterns or other predetermined schedule means
Reexamination Certificate

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Motor speed controller and gain setting method of the...

Electricity: motive power systems – Positional servo systems – 'reset' systems
Reexamination Certificate

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Vacuum processing apparatus and control method thereof

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With etchant gas supply or exhaust structure located outside...
Reexamination Certificate

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Vacuum processing apparatus and substrate transfer method

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2042095

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