4. Organic compounds -- part of the class 532-570 series
  5. Organic compounds
  6. Diazo or diazonium

Takao Yoshihara

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Chemical amplification type photoresist composition, method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Patterning process and resist composition

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Polymer, resist composition and patterning process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Sulfonyldiazomethanes, photoacid generators, resist...

Organic compounds -- part of the class 532-570 series – Organic compounds – Diazo or diazonium
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2700871

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