4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Tae Hyun Lim

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Inclined carrier transferring apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Sputtering apparatus, method of operating the same, and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Support platform of non-contact transfer apparatus

Conveyors: fluid current – Having means for maintaining load in suspension along flow path – By load supporting jets
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2308426

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