Inclined carrier transferring apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering

Reexamination Certificate

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Details

C118S729000, C414S217000, C414S939000, C198S836100, C198S679000, C198S805000

Reexamination Certificate

active

08007644

ABSTRACT:
An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.

REFERENCES:
patent: 4892451 (1990-01-01), Mahler
patent: 5133285 (1992-07-01), Mahler et al.
patent: 5909995 (1999-06-01), Wolf et al.
patent: 2006/0035021 (2006-02-01), Hartig

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