Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate
2011-08-30
2011-08-30
McDonald, Rodney G (Department: 1724)
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
C118S729000, C414S217000, C414S939000, C198S836100, C198S679000, C198S805000
Reexamination Certificate
active
08007644
ABSTRACT:
An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.
REFERENCES:
patent: 4892451 (1990-01-01), Mahler
patent: 5133285 (1992-07-01), Mahler et al.
patent: 5909995 (1999-06-01), Wolf et al.
patent: 2006/0035021 (2006-02-01), Hartig
Kim Sung Eun
Lim Tae Hyun
Moon Yang Sik
Yoo Kwang Jong
Yun Byung Han
Brinks Hofer Gilson & Lione
LG Display Co. Ltd.
McDonald Rodney G
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