4. Optics: measuring and testing
  5. By light interference
  6. For dimensional measurement

Tadayasu Nishikawa

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Exposure apparatus and device fabrication method using the same

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate

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Objective lens driving device and optical pickup device...

Dynamic optical information storage or retrieval – Dynamic mechanism optical subsystem – Transducer carriage or actuator
Reexamination Certificate

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Positioning apparatus, exposure apparatus, and device...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2313357

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