Positioning apparatus, exposure apparatus, and device...

Details Positioning apparatus, exposure apparatus, and device... Positioning apparatus, exposure apparatus, and device...

2011-01-04

2011-01-04

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07864337

ABSTRACT:
A positioning apparatus comprises a first measuring device measuring a position of the stage in a first measuring range, a second measuring device measuring a position of the stage in a second measuring range having an overlapping range overlapping the first measuring range, a third measuring device measuring a position of the stage in the overlapping range, and a controller controlling the first measuring device to take over the measurement value obtained by the second measuring device in the overlapping range in moving the stage from the second measuring range to the first measuring range, thereby switching from measurement by the second measuring device to measurement by the first measuring device. The controller performs correction processing based on the measurement by the third measuring device so as to reduce an error of the measurement value obtained by the first measuring device after the switching.

REFERENCES:
patent: 6819433 (2004-11-01), Takai et al.
patent: 6864963 (2005-03-01), Chen et al.
patent: 7016049 (2006-03-01), Kurosawa
patent: 7292348 (2007-11-01), Akimoto
patent: 2002-319541 (2002-10-01), None
patent: 2006-120699 (2006-05-01), None

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