4. Computer-aided design and analysis of circuits and semiconductor
  5. Nanotechnology related integrated circuit design

Swaminathan (Sam) Sivakumar

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Accommodating diffraction in the printing of features on a...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Multiple exposure technique to pattern tight contact geometries

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Sub-resolution assist features

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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