Coating processes
Coating by vapor, gas, or smoke
Base includes an inorganic compound containing silicon or...
Inventor
active
Anodized aluminum susceptor for forming integrated circuit...
Substrate having uniform tungsten silicide film and method of ma
Uniform tungsten silicide films produced by chemical vapor depos
Uniform tungsten silicide films produced by chemical vapor depos
Uniform tungsten silicide films produced by chemical vapor depos
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