4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Suresh Santhanam

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Encapsulation of MEMS devices using pillar-supported caps

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Thermally responsive
Reexamination Certificate

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Microelectromechanical structure and process of making same

Static information storage and retrieval – Systems using particular element – Semiconductive
Patent

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Microelectromechanical structure and process of making same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Patent

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Profile ID: LFUS-PAI-P-1827232

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