4. Optical: systems and elements
  5. Holographic system or element
  6. Using a hologram as an optical element

Sung-min Cho

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Layer-by-layer etching apparatus using neutral beam and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Layer-by-layer etching apparatus using neutral beam and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Optical scanning unit with rotatable hologram disc

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Reexamination Certificate

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Semiconductor substrate damage protection system

Material or article handling – Process
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2666313

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