4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Sung-Hun Chi

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Dry etching method for multilayer film

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Dry etching method of multilayer film

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Plug forming method for semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1808005

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