4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Sukeyoshi Tsunekawa

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Apparatus and method for surface treatment

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Manufacturing method of semiconductor integrated circuit device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for manufacturing semiconductor device having an...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of and apparatus for removing an organic film

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Method of manufacturing a semiconductor integrated circuit

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-20376

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