4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Sughrue Mion LLP

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Beam column for charged particle beam device

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Chemically amplified resist, polymer for the chemically...

Organic compounds -- part of the class 532-570 series – Organic compounds – Heterocyclic carbon compounds containing a hetero ring...
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Dynamic automatic focusing method and apparatus using...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
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Kill index analysis for automatic defect classification in...

Semiconductor device manufacturing: process – Making regenerative-type switching device – Having structure increasing breakdown voltage
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Method and apparatus for removal of surface contaminants...

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
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