4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Sudhakar Subrahmanyam

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Film to tie up loose fluorine in the chamber after a clean proce

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent

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Film to tie up loose fluorine in the chamber after a clean...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method and apparatus for determining the endpoint in a plasma cl

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Method and apparatus for improving film stability of halogen-dop

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Method and apparatus for improving film stability of halogen-dop

Metal working – Barrier layer or semiconductor device making
Patent

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Profile ID: LFUS-PAI-P-1055705

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