4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Steven Prawer

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Implanted counted dopant ions

Active solid-state devices (e.g. – transistors – solid-state diode – With specified dopant
Reexamination Certificate

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Method and system for single ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3012249

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