Method for adjusting sensitivity of a sensor

Details Method for adjusting sensitivity of a sensor Method for adjusting sensitivity of a sensor

1994-04-12

1995-11-14

Williams, Hezron E.

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

7351418, G01L 2500

Patent

active

054656044

ABSTRACT:
An accelerometer comprising a microfabricated acceleration sensor and monolithically fabricated signal conditioning circuitry. The sensor comprises a differential capacitor arrangement formed by a pair of capacitors. Each capacitor has two electrodes, one of which it shares electrically in common with the other capacitor. One of the electrodes (e.g., the common electrode) is movable and one of the electrodes is stationary in response to applied acceleration. The electrodes are all formed of polysilicon members suspended above a silicon substrate. Each of the capacitors is formed of a plurality of pairs of electrode segments electrically connected in parallel and, in the case of the movable electrodes, mechanically connected to move in unison. When the substrate is accelerated, the movable electrodes move such that the capacitance of one of the capacitors increases, while that of the other capacitor decreases. The two capacitors are connected to signal conditioning circuitry which converts this differential capacitance into a corresponding voltage. Both open loop and force-balance operation are shown. A full scale sensitivity is set based on a preliminary sensitivity calculation.

REFERENCES:
patent: 4711128 (1987-12-01), Boura
patent: 4941354 (1990-07-01), Russell et al.
patent: 5054320 (1991-10-01), Yvon
patent: 5103667 (1992-04-01), Allen et al.
patent: 5211051 (1993-05-01), Kaiser et al.
patent: 5251484 (1993-12-01), Mastache

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