4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Steven H. Johnston

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Chemical oxide removal of plasma damaged SiCOH low k...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Integrated dual damascene RIE process with organic...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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