4. Thermal measuring and testing
  5. Thermal calibration system

Stephan E. Lassig

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Apparatus and method for compensating for errors in temperature

Thermal measuring and testing – Thermal calibration system
Patent

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Apparatus and method for compensating for errors in temperature

Thermal measuring and testing – Thermal calibration system
Patent

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Characterization, modeling, and design of an electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Semiconductor wafer heating chamber

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Profile ID: LFUS-PAI-P-121899

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