4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Stepehen B. Ackerman

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Planarization process using tailored etchback and CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Trench free polysilicon gate definition process for a non-volati

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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