4. Cleaning and liquid contact with solids
  5. Processes
  6. Combined

Stefan De Gendt

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Atomic layer deposition method for depositing a layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Cleaning of plasma chamber walls using noble gas cleaning step

Cleaning and liquid contact with solids – Processes – Combined
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2158105

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