4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Son Trinh

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Chamber design for modular manufacturing and flexible onsite...

Coating apparatus – Program – cyclic – or time control
Reexamination Certificate

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Heat exchange passage connection

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Pivoting lid assembly for a chamber

Receptacles – Closures – Pivotable
Patent

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Profile ID: LFUS-PAI-P-1816622

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