4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Sohail S. Qamar

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Sputter target assembly having a metal-matrix-composite...

Powder metallurgy processes – Powder metallurgy processes with heating or sintering – Making composite or hollow article
Reexamination Certificate

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Sputter target design

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-1575475

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