4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

So Won Kim

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Method of depositing titanium nitride thin film and CVD depositi

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Method of depositing titanium nitride thin film and CVD...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Titanium nitride film-MOCVD method incorporating use of tetrakis

Coating processes – Coating by vapor – gas – or smoke
Patent

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