4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Simon John Molloy

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Grooved capacitor structure for integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Metallization performance in electronic devices

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
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Metallization performance in electronic devices

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
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Method for cleaning tungsten from deposition wall chambers

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
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Method for forming vias in a low dielectric constant material

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-583965

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