4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Having predetermined light transmission regions

Sima Salamati-Saradh

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Apparatus for in-situ reticle cleaning at photolithography tool

Drying and gas or vapor contact with solids – Apparatus – Forms
Reexamination Certificate

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Method and apparatus for in-situ reticle cleaning at...

Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate

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Method for reducing gate oxide damage caused by charging

Semiconductor device manufacturing: process – Making field effect device having pair of active regions...
Reexamination Certificate

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Method for reducing gate oxide damage caused by charging

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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System and method for detecting particles on substrate-supportin

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
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Profile ID: LFUS-PAI-P-1866915

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