4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Processes of growth from liquid or supercritical state
  6. Having pulling during growth

Siltronic AG

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Cleaning liquid and cleaning method for electronic material

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Coated semiconductor wafer, and process and device for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Crucible for the growth of silicon single crystal and...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
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Crystal pulling apparatus and method for the production of...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
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Device for the simultaneous double-side grinding of a...

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
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