4. Measuring and testing
  5. Fluid pressure gauge
  6. Diaphragm

Silicon Microstructures Inc.

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Anodically bonded, gas impervious cavity structures...

Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate

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Extremely low cost pressure sensor realized using deep...

Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate

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Monolithic flow sensor and pressure sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Patent

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Pressure sensor adjustment using backside mask

Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate

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Temperature extraction from a pressure sensor

Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation
Reexamination Certificate

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