Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation
Reexamination Certificate
2009-01-28
2011-12-27
Allen, Andre (Department: 2855)
Measuring and testing
Fluid pressure gauge
With pressure and/or temperature compensation
C073S723000
Reexamination Certificate
active
08082796
ABSTRACT:
Circuits, methods, and systems to compensate pressure sensor readings for changes in temperature. An example measures temperature in a field-effect-transistor-based pressure sensor or micro-electromechanical system by measuring the device's threshold voltage. This threshold voltage is linearly dependent on the temperature but shows negligible sensitivity to mechanical stress. This allows the pressure sensor's temperature to be determined in an environment of changing pressure. Once the temperature is known, the pressure sensor's pressure readings can be adjusted. The threshold voltage can be extracted by measuring the turn-on transistor characteristic of the device and using device models. Alternately, the threshold voltage can be extracted using threshold voltage extraction circuits.
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Allen Andre
Kilpatrick Townsend & Stockton LLP
Silicon Microstructures Inc.
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