Pressure sensor adjustment using backside mask

Details Pressure sensor adjustment using backside mask Pressure sensor adjustment using backside mask

2007-08-06

2009-02-10

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07487681

ABSTRACT:
Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. The backside cavity has an opening that is cross shaped, where the dimensions of the cross may be varied to adjust pressure sensor sensitivity. The cross may have one or more rounded corners to reduce peak stress, for example, the interior corners may be rounded. A sensing conductor may be routed over one or more corners including the interior corners to detect breakage.

REFERENCES:
patent: 6341528 (2002-01-01), Hoffman et al.
patent: 6651506 (2003-11-01), Lee et al.
patent: 6874367 (2005-04-01), Jakobsen
patent: 7111518 (2006-09-01), Allen et al.
patent: 2003/0100316 (2003-05-01), Odamura
patent: 2008/0160659 (2008-07-01), Craddock et al.

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