4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Silicon Labs SC, Inc.

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MEMS coupler and method to form the same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method to form a MEMS structure having a suspended portion

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Precision, temperature stable clock using a...

Oscillators – With frequency adjusting means – With voltage sensitive capacitor
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