4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Sian Collins

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Cleaning solutions and etchants and methods for using same

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Selective silicon etch process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2320515

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