4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Shuichiro Sugiyama

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Microwave plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Photovoltaic element

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate

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Process for forming a silicon-based film on a substrate...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate

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Semiconductor element, and method of forming silicon-based film

Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate

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Semiconductor thin-film formation process, and amorphous...

Batteries: thermoelectric and photoelectric – Photoelectric – Cells
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1680261

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