4. Optics: measuring and testing
  5. By configuration comparison
  6. With two images of single article compared

Showgo Matsui

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Method for inspecting a pattern and an apparatus for inspecting

Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Patent

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Pattern data inspection method and storage medium

Error detection/correction and fault detection/recovery – Data processing system error or fault handling – Reliability and availability
Reexamination Certificate

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Pattern inspection method and system

Optics: measuring and testing – By configuration comparison – With two images of single article compared
Patent

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Profile ID: LFUS-PAI-P-457558

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