4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Processes of growth from liquid or supercritical state
  6. Having pulling during growth

Shinya Sadohara

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Production method for silicon single crystal and production...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step of heat treating...
Reexamination Certificate

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Silicon single crystal producing method, annealed wafer, and...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2283122

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