4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state
  6. With decomposition of a precursor

Shinsuke Sadamitsu

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Evaluation method of IG effectivity in semiconductor silicon...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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High resistance silicon wafer and its manufacturing method

Active solid-state devices (e.g. – transistors – solid-state diode – With specified dopant – Deep level dopant
Reexamination Certificate

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High resistance silicon wafer and its manufacturing method

Active solid-state devices (e.g. – transistors – solid-state diode – With specified dopant – Deep level dopant
Reexamination Certificate

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High resistivity silicon wafer and method for fabricating...

Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing
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High-resistance silicon wafer and process for producing the...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1921582

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