4. Optics: measuring and testing
  5. By alignment in lateral direction

Shinn-Sheng Yu

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Approach to improve ellipsometer modeling accuracy for...

Optics: measuring and testing – By polarized light examination – Of surface reflection
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Assist feature for random, isolated, semi-dense, and other...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Contact hole printing by packing and unpacking

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Defocus-invariant exposure for regular patterns

Radiation imagery chemistry: process – composition – or product th – Plural exposure steps
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Hole printing by packing and unpacking using alternating...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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