Shinji Sakano

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Controlling device for substrate processing apparatus and...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Device having superlattice structure, and method of and apparatu

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Etching end-point detecting method

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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High performance optical add/drop multiplexer and optical...

Optical waveguides – With optical coupler – Plural
Reexamination Certificate

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Light amplification medium control method, light...

Optical: systems and elements – Optical amplifier – Correction of deleterious effects
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Profile ID: LFUS-PAI-P-702286

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