4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Shinji Miyaki

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Charged particle beam exposure system using line beams

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Electron beam exposure method and apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent

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Outboard motor

Machines not elsewhere specified – Engine – Vehicle
Design Patent

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Profile ID: LFUS-PAI-P-1281979

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