Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Patent
1989-01-31
1990-08-21
Howell, Janice A.
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
2504922, 250398, 364489, 364490, 364491, H01J 37302
Patent
active
049509101
ABSTRACT:
A method for depicting a pattern on a sample having a plurality of exposure areas placed on a movable stage by irradiating an electron beam. A pattern density is calculated from data of a pattern to be exposed for every exposure area on the sample. Next, the calculated pattern density is compared with a predetermined pattern density. Then when the calculated pattern density in a first exposure area contained in said exposure pattern area is less than the predetermined pattern density, the pattern is depicted therein by a continuous stage moving process. On the other hand, when the calculated pattern density in a second exposure area contained in the exposure areas is equal or greater than the predetermined pattern density, the pattern is depicted therein by a step and repeat process.
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Kai Jun-ichi
Miyaki Shinji
Takahashi Yasushi
Yasuda Hiroshi
Fujitsu Limited
Howell Janice A.
Nguyen Kiet T.
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